MEMS/NEMS and Micro-Nano Integration
Microelectromechanical and nanoelectromechanical systems (MEMS/NEMS) are vital for sensing, actuation, and signal processing. This session delves into the integration of MEMS/NEMS with nanoscale components for enhanced functionality. Topics include fabrication of nanoscale resonators, switches, and accelerometers, as well as energy harvesters. Challenges in system miniaturization, signal noise reduction, and packaging will be discussed. Applications in medical devices, automotive systems, and smart infrastructure will be highlighted. This track bridges microsystems with nanoinnovation
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