Advanced Nano Fabrication, Lithography & Patterning Technologies
This session examines the techniques that enable atomic-level precision in manufacturing. Presentations cover EUV lithography, nano-imprint lithography, self-assembly, and molecular patterning. Advances improving resolution, throughput, and defect mitigation will be highlighted. Speakers will discuss cost-effective approaches for large-area nano structuring. Case studies include chips, sensors, optical components, and MEMS devices. Integration challenges with existing semiconductor lines will be explored. The session forecasts future fabrication paradigms beyond traditional lithography.
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