Advanced Nanotechnology & Nano Electronics

Track5: Nano metrology

Nano metrology is a subfield of metrology, concerned with the science of measurement at the nanoscale level. Nano metrology has a crucial role in order to produce nanomaterials and devices with a high degree of accuracy and reliability in Nano manufacturing. The needs for measurement and characterization of new sample structures and characteristics far exceed the capabilities of current measurement science. A challenge in this field is to develop or create new measurement techniques and standards to meet the needs of next-generation advanced manufacturing, which will rely on nanometer scale materials and technologies.