Track 13: Helium Ion Microscopy and Spectroscopy

The helium ion microscope can collect energy spectra of backscattered helium ions and identify elements in the sample with submicron resolution. We will show examples of biological, bio-geo materials and energy materials showing differences in imaging with HIM vs. SEM along with some EDS and RBS data. As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images with a large depth of field on a wide range of materials.

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